#1. P/N: N510067606AA | Part name: Manifold | Remarks: VV3Q12-08-X437 | Qty: 1
#2. P/N: N510067608AA | Part name: Manifold | Remarks: VV3Q12-16-X439 | Qty: 1
#3. P/N: N510067607AA | Part name: Manifold | Remarks: VV3Q12-08-X438 | Qty: 1
#4. P/N: N510054843AA | Part name: Valve | Remarks: VQ111U-5MO-X479 | Qty: 16
#5. P/N: N510068524AA | Part name: Sensor | Remarks: PFMV530F-1-N-X920B | Qty: 1
#6. P/N: N510068525AA | Part name: Sensor | Remarks: PFMV530F-1-N-X921B | Qty: 1
#7. P/N: N510059928AA | Part name: Element | Remarks: AXT1197-7A-03 | Qty: 10
#8. P/N: N510054845AA | Part name: Joint | Remarks: AXT1197-1A | Qty: 16
#9. P/N: N510059867AA | Part name: O-Ring | Remarks: AXT1197-8A | Qty: 10
#10. P/N: N510068526AA| Part name: Sensor | Remarks: PFMV530F-1-N-X922B | Qty: 1
#11. P/N: N510068527AA| Part name: Sensor | Remarks: PFMV530F-1-N-X923B | Qty: 1
#12. P/N: N510054844AA| Part name: Valve | Remarks: VQ111U-5LO-X480 | Qty: 16